This paper presents the methodology of multi-domain modeling and simulation of the devices fabricated in micro-machined CMOS technology. At the beginning it shows the basic concepts of the integration of the standard microelectronic circuits and micro-machined devices on one chip. The base for further considerations is the electro-thermal converter. The paper presents the important physical effects which should be taken into account during modeling process of such devices. It also shows some of the possible modeling approaches. One of them is the formulation of the one-dimensional physical equations of this device in ELDO HDL-A language. The article discusses the most important steps in model creation process. It shows the simulation and experimental model verification. At the end, we discuss the concept of device parameters optimization and further plans of device library for the standard CAD programs.

Bio:
Mariusz Orlikowski is a Ph.D student at the Technical University of Lodz, Poland in the Dept. of Microelectronics and Computer Science. His areas of interest include microelectronic devices modeling, particularly thermal effects. Mariusz Zubert is a Ph.D. student at the Technical University of Lodz, Poland. His areas of interest include VLSI circuit and mictrostructures modeling and multi-domain simulation using hardware description languages. Wojciech Wojciak is a Ph.D. student at the Technical University of Lodz, Poland. He is responsible for VLSI Design Laboratory in the Department of Microelectronics and Computer Science. Prof. Andrzej Napleralski is a professor at the Technical University of Lodz, Poland and the head of Department of Microelectronics and Computer Science. His main research interests are: thermal and electro-thermal modeling and simulation of semiconductor devices and integrated circuits, power semiconductor devices modeling and CAD-CAM of electronic circuits.